Magnetic tunnel junction memory cell with a buffer-layer and methods for forming the same

ABSTRACT

A memory cell structure including a dielectric cap layer disposed over a substrate and a first dielectric layer disposed over the dielectric cap layer. The memory cell structure may further include a buffer layer disposed over the first dielectric layer, a connection via structure embedded in the buffer layer, the first dielectric layer, and the dielectric cap layer. The memory cell structure may further include may further include a bottom electrode disposed on the connection via structure and the buffer layer, and a magnetic tunnel junction (MTJ) memory cell including one or more MTJ layers disposed on the bottom electrode.

BACKGROUND

Semiconductor manufacturing may implement ion beam etching to formvarious layers having various patterns throughout a semiconductorstack-up. Ion beam etching may selectively etch portions of the samelayer(s) at different rates depending on a loading effect in whichcertain portions of a topmost layer are exposed to ion beams at anincreased rate than other portions of the same layer. Thus, one regionof a material layer may be etched at an increased rate as compared toanother region of the same material layer. As a result of this selectiveetching, logic portions of a semiconductor device may be exposedthroughout various layers, subjecting the logic portions tocontamination.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is a vertical cross-sectional view of an MTJ memory cellstructure after formation of an array of memory cells and an array ofmetallic etch stop portions.

FIG. 2 is a vertical cross-sectional view of an exemplary structureafter formation of complementary metal-oxide-semiconductor (CMOS)transistors and metal interconnect structures formed in dielectricmaterial layers and an ion beam etching buffer layer according to anembodiment of the present disclosure.

FIG. 3 is a vertical cross-sectional view of the exemplary structureafter formation of an array of connection via structures according to anembodiment of the present disclosure.

FIG. 4 is a vertical cross-sectional view of the exemplary structureafter formation of a bottom electrode material layer, a nonmagneticmetallic buffer layer, a synthetic antiferromagnetic layer, anonmagnetic tunnel barrier layer, a free magnetization layer, a topelectrode material layer, and a metallic etch mask material layeraccording to an embodiment of the present disclosure.

FIG. 5 is a vertical cross-sectional view of the exemplary structureafter patterning the metallic etch mask material layer into metallicetch mask portions according to an embodiment of the present disclosure.

FIG. 6 is a vertical cross-sectional view of the exemplary structureafter formation of an array of memory cells and an array of metallicetch stop portions according to an embodiment of the present disclosure.

FIG. 7 is a vertical cross-sectional view of the exemplary structureafter formation of an array of inner dielectric spacer portionsaccording to an embodiment of the present disclosure.

FIG. 8 is a vertical cross-sectional view of the exemplary structureafter formation of an array of outer dielectric spacer portionsaccording to an embodiment of the present disclosure.

FIG. 9 is a vertical cross-sectional view of the exemplary structureafter formation of a memory-level dielectric layer according to anembodiment of the present disclosure.

FIG. 10 is a vertical cross-sectional view of the exemplary structureafter formation of an array contact structures within the memory arrayregion 100 and the logic region 200 according to an embodiment of thepresent disclosure.

FIG. 11 is a flowchart that illustrates the general processing steps ofthe methods of the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Generally, the structures and methods of the present disclosure may beused to form a memory cell and/or an array of memory cells.Specifically, the structures and methods of the present disclosure maybe employed to form a magnetic tunnel junction memory cell and/or anarray of magnetic tunnel junction memory cells. While the presentdisclosure is described employing an exemplary structure includingmagnetic tunnel junction memory cells, the methods of the presentdisclosure may be used to form any memory cell or any array of memorycells including a vertical stack of patterned material portions thatconstitutes a memory cell and containing a top electrode.

It is to be understood that the memory devices according to embodimentsof the present disclosure may comprise a single discrete memory cell, aone-dimensional array of memory cells, or a two-dimensional array ofmemory cells. It is also to be understood that a one-dimensional arrayof memory cells of the present disclosure may be implemented as aperiodic one-dimensional array of memory cells, and a two-dimensionalarray of memory cells of the present disclosure may be implemented as aperiodic two-dimensional array of memory cells. In addition, whilepresent disclosure is described using an embodiment in which atwo-dimensional array of memory cells is formed within a specific metalinterconnect level, embodiments are expressly contemplated herein inwhich the two-dimensional array of memory cells is formed withindifferent metal interconnect levels.

FIG. 1 is a vertical cross-sectional view of an MTJ memory cellstructure after formation of an array of memory cells and an array ofmetallic etch stop portions. FIG. 1 illustrates the loading effect thatoccurs during formation of an MTJ memory cell structure. Referring toFIG. 1 , an ion beam etching (IBE) may be performed to transfer thepattern of metallic etch mask portions 159 through a layer stackincluding a bottom electrode material layer 126 and a MTJ layer 140. Thelayer stack of the metallic etch mask material portions 159, the MTJlayer 140, and the bottom electrode material layer 126 may be patternedinto an array of memory cells (126, 140) based on the metallic etch maskportions 159.

As a result of the angular orientation of the IBE process, asillustrated by ion beams A and B (illustrated as dashed lines), thememory array region 100 and the logic region 200 may be etched atdifferent rates due to a loading effect. The loading effect is theresult of the various densities of layers at the IBE stage, such thatvarying topological pattern variations will cause different etchingrates throughout the stack-up. For example, the memory array region 100may be subject to a shading effect due to the density of the array ofmemory cells (126, 140) and the array of metallic etch mask portions159. The shading effect reduces the exposure of the connection-via-leveldielectric layer 110 to the ion beams A such that the top-most portions(e.g., metallic etch mask portions 159) of the memory array region 100may limit the amount of ion beams able to reach the connection-via-leveldielectric layer 110. Comparatively, the logic region 200 may have alower element density and may not be subject to a shading effect causedby dense MTJ portions, such that the connection-via-level dielectriclayer 110 has increased exposure to the ion beams B. Consequently, theconnection-via-level dielectric layer 110 in the logic region 200 may beetched at a higher etching rate than in the memory array region 100. Forexample, portions of the connection-via-level dielectric layer 110 inthe memory array region 100 may be recessed by around 130 A as a resultof the ion beam etching process, while portions of theconnection-via-level dielectric layer 110 in the logic region 200 may berecessed by around 500 A.

In some instances, depending on the thickness and material compositionof the connection-via-level dielectric layer 110, theconnection-via-level dielectric layer 110 may be fully etched away inthe logic region 200. In such instances, the dielectric cap layer 108may be fully exposed to the ion beam etching process. This may causesome of the dielectric cap layer 108 to be etched away. In someinstances, all of the dielectric cap layer 108 may be etched away,therefore causing the metal interconnect structures 648 to be exposedand subject to contamination.

The increased recession of the connection-via-level dielectric layer 110within the logic region 200 due to the loading effect as compared to thememory array region 100 is a result of the inherent ion beam etchingrates of the connection-via-level dielectric layer 110. The bottomelectrode material layer 126 may be formed from a material such astitanium nitride (TiN), which has a relative etching rate of 1. Forexample, the connection-via-level dielectric layer 110 may be formedfrom an oxide-based material having a relative etching rate about 2.8(i.e. in relation to a relative etching rate of 1 for TiN). Theselectivity of the oxide (connection-via-level dielectric layer 110) tothe TiN (bottom electrode material layer 126) is poor, having a totaletching rate of 2.2 to 2.9 within the logic region 200 relative to theetching rate of the bottom electrode material layer 126. For example, aconnection-via-level dielectric layer 110 comprised of oxide may be ionbeam etched at a rate that is 2.2 to 2.9 times as fast as the rate toion beam etch a bottom electrode material layer 126L comprised of TiN.

The increased recession of the connection-via-level dielectric layer 110within the logic region 200 due to the loading effect as compared to thememory array region 100 may cause further complications in subsequentetching processes. Additional etch processes may be performed during thesubsequent formation of structures after the IBE etch process has beenperformed. For example, additional etch processes may be performed whenforming dielectric spacers (not shown) around the array of memory cells(126, 140). The additional anisotropic etch process performed to formstructures such as an array of inner dielectric spacer portions may alsobe applied to any remaining portions of the connection-via-leveldielectric layer 110 and the dielectric cap layer 108 in the logicregion 200. The remaining portions of the connection-via-leveldielectric layer 110 and the dielectric cap layer 108 in the logicregion 200 subject to increased recession due to the loading effect maynot be thick enough to persist through any subsequent etching processes.Thus, performing subsequent etching processes after ion beam etching mayresult in the complete removal of the connection-via-level dielectriclayer 110 and the dielectric cap layer 108 in the logic region 200.Exposing the metal interconnect structures 648 in the logic region 200to subsequent etching processes may result in contamination of the metalinterconnect structures 648, causing reduced conductivity or othercomplications in the manufacturing process resulting in ineffectivedevices.

Various embodiments of the present disclosure allow for mitigating theloading effect as well as reducing the contamination of metal layers.Various embodiments include devices and methods for a buffer layer inmagnetoresistive random-access memory (MRAM) designs for mitigatingunderneath loading effect.

FIG. 2 is a vertical cross-sectional view of an exemplary structureafter formation of complementary metal-oxide-semiconductor (CMOS)transistors and metal interconnect structures formed in dielectricmaterial layers and an ion beam etching buffer layer according to anembodiment of the present disclosure. Referring to FIG. 2 , an exemplarystructure according to an embodiment of the present disclosure isillustrated. The exemplary structure includes a substrate 9, which maybe a semiconductor substrate such as a commercially available siliconsubstrate. Shallow trench isolation structures 720 including adielectric material such as silicon oxide may be formed in an upperportion of the substrate 9. Suitable doped semiconductor wells, such asp-type wells and n-type wells, may be formed within each area that islaterally enclosed by a portion of the shallow trench isolationstructures 720. Field effect transistors may be formed over the topsurface of the substrate 9. For example, each field effect transistormay include a source region 732, a drain region 738, a semiconductorchannel 735 that includes a surface portion of the substrate 9 extendingbetween the source region 732 and the drain region 738, and a gatestructure 750. Each gate structure 750 may include a gate dielectric752, a gate electrode 754, a gate cap dielectric 758, and a dielectricgate spacer 756. A source-side metal-semiconductor alloy region 742 maybe formed on each source region 732, and a drain-sidemetal-semiconductor alloy region 748 may be formed on each drain region738.

The exemplary structure may include a memory array region 100 in whichan array of memory elements is subsequently formed, and a logic region200 in which logic devices that support operation of the array of memoryelements are formed. In one embodiment, devices (such as field effecttransistors) in the memory array region 100 may include bottom electrodeaccess transistors that provide access to bottom electrodes of memorycells to be subsequently formed. Top electrode access transistors thatprovide access to top electrodes of memory cells to be subsequentlyformed may be formed in the logic region 200 at this processing step.Devices (such as field effect transistors) in the logic region 200 mayprovide functions that are needed to operate the array of memory cellsto be subsequently formed. Specifically, devices in the logic region 200may be configured to control the programming operation, the eraseoperation, and the sensing (read) operation of the array of memorycells. For example, the devices in the logic region 200 may include asensing circuitry and/or a top electrode bias circuitry. The devicesformed on the top surface of the substrate 9 may include complementarymetal-oxide-semiconductor (CMOS) transistors and optionally additionalsemiconductor devices (such as resistors, diodes, capacitors, etc.), andare collectively referred to as CMOS circuitry 700.

Various metal interconnect structures (612, 618, 622, 628, 632, 638,642, 648) formed in dielectric material layers (601, 610,620,630, and640) may be subsequently formed over the substrate 9 and the devices(such as field effect transistors). The dielectric material layers mayinclude, for example, a contact-level dielectric material layer 601, afirst metal-line-level dielectric material layer 610, a secondline-and-via-level dielectric material layer 620, a thirdline-and-via-level dielectric material layer 630, and a fourthline-and-via-level dielectric material layer 640. The metal interconnectstructures may include device contact via structures 612 formed in thecontact-level dielectric material layer 601 and contact a respectivecomponent of the CMOS circuitry 700, first metal line structures 618formed in the first metal-line-level dielectric material layer 610,first metal via structures 622 formed in a lower portion of the secondline-and-via-level dielectric material layer 620, second metal linestructures 628 formed in an upper portion of the secondline-and-via-level dielectric material layer 620, second metal viastructures 632 formed in a lower portion of the third line-and-via-leveldielectric material layer 630, third metal line structures 638 formed inan upper portion of the third line-and-via-level dielectric materiallayer 630, third metal via structures 642 formed in a lower portion ofthe fourth line-and-via-level dielectric material layer 640, and fourthmetal line structures 648 (i.e. copper metal contact/copper substrateused to convey logic signals throughout the logic region 200) formed inan upper portion of the fourth line-and-via-level dielectric materiallayer 640. In one embodiment, the second metal line structures 628 mayinclude source lines that are connected a source-side power supply foran array of memory elements. The voltage provided by the source linesmay be applied to the bottom electrodes through the access transistorsprovided in the memory array region 100.

Each of the dielectric material layers (601, 610, 620, 630, 640) mayinclude a dielectric material such as undoped silicate glass, a dopedsilicate glass, organosilicate glass, amorphous fluorinated carbon,porous variants thereof, or combinations thereof. Each of the metalinterconnect structures (612, 618, 622, 628, 632, 638, 642, 648) mayinclude at least one conductive material, which may be a combination ofa metallic liner layer (such as a metallic nitride or a metalliccarbide) and a metallic fill material. Each metallic liner layer mayinclude TiN, TaN, WN, TiC, TaC, and WC, and each metallic fill materialportion may include W, copper (Cu), Al, Co, Ru, Mo, Ta, Ti, alloysthereof, and/or combinations thereof. Other suitable materials withinthe contemplated scope of disclosure may also be used. In oneembodiment, the first metal via structures 622 and the second metal linestructures 628 may be formed as integrated line and via structures by adual damascene process, the second metal via structures 632 and thethird metal line structures 638 may be formed as integrated line and viastructures, and/or the third metal via structures 642 and the fourthmetal line structures 648 may be formed as integrated line and viastructures. While the present disclosure is described using anembodiment in which an array of memory cells formed over the fourthline-and-via-level dielectric material layer 640, embodiments areexpressly contemplated herein in which the array of memory cells may beformed at a different metal interconnect level.

A dielectric cap layer 108 and a connection-via-level dielectric layer110 may be sequentially formed over the metal interconnect structuresand the dielectric material layers. For example, the dielectric caplayer 108 may be formed on the top surfaces of the fourth metal linestructures 648 and on the top surface of the fourth line-and-via-leveldielectric material layer 640. The dielectric cap layer 108 includes adielectric capping material that may protect underlying metalinterconnect structures such as the fourth metal line structures 648. Inone embodiment, the dielectric cap layer 108 may include a material thatmay provide high etch resistance, i.e., a dielectric material and alsomay function as an etch stop material during a subsequent anisotropicetch process that etches the connection-via-level dielectric layer 110.For example, the dielectric cap layer 108 may include silicon carbide orsilicon nitride, and may have a thickness in a range from 5 nm to 30 nm,although lesser and greater thicknesses may also be used.

The connection-via-level dielectric layer 110 may include any materialthat may be used for the dielectric material layers (601, 610, 620, 630,640). For example, the connection-via-level dielectric layer 110 mayinclude undoped silicate glass or a doped silicate glass deposited bydecomposition of tetraethylorthosilicate (TEOS). The thickness of theconnection-via-level dielectric layer 110 may be in a range from 50 nmto 200 nm, although lesser and greater thicknesses may also be used. Thedielectric cap layer 108 and the connection-via-level dielectric layer110 may be formed as planar blanket (unpatterned) layers having arespective planar top surface and a respective planar bottom surfacethat extends throughout the memory array region 100 and the logic region200.

A buffer layer 112 may be sequentially formed over theconnection-via-level dielectric layer 110. The buffer layer 112 mayinclude an ion-beam etching-resistant material that may protect thedielectric cap layer 108, the connection-via-level dielectric layer 110,and the underlying metal interconnect structures such as the fourthmetal line structures 648. For example, the buffer layer 112 may becomprised of a material to mitigate the loading effects applied duringthe ion beam etching process, such that the buffer layer 112 may beetched at a reduced rate as compared to implementations utilizing only adielectric cap layer 108 and a connection-via-level dielectric layer110, thus preventing the fourth metal line structures 648 from beingexposed and therefore contaminated during subsequent etching processes.In one embodiment, the buffer layer 112 may include a material that mayprovide high etch resistance, such as aluminum oxide (Al₂O₃), which mayhave a relative ion beam etching rate of 0.8 to 1.3 relative to theetching rate of the bottom electrode material layer 126L. For example, abuffer layer 112 comprised of Al₂O₃ may be ion beam etched at a rate of0.8-1.3 times as fast as the rate to ion beam etch a bottom electrodematerial layer 126L comprised of TiN. In one embodiment, the bufferlayer 112 may include a material such as tantalum pentoxide (Ta₂O₅). Thebuffer layer 112 may have a thickness in a range from 5 nm to 80 nm,such as from 10 nm to 70 nm, although lesser and greater thicknesses mayalso be used. The buffer layer 112 may be formed as planar blanket(unpatterned) layers having a respective planar top surface and arespective planar bottom surface that extends throughout the memoryarray region 100 and the logic region 200. In one embodiment, the bufferlayer 112 may have a ratio of thickness of 0.7 to 1 relative to thethickness of the bottom electrode layer 126L.

FIG. 3 is a vertical cross-sectional view of the exemplary structureafter formation of an array of connection via structures according to anembodiment of the present disclosure. Referring to FIG. 3 , via cavitiesmay be formed through the buffer layer 112, the connection-via-leveldielectric layer 110, and the dielectric cap layer 108. For example, aphotoresist layer (not shown) may be applied over the buffer layer 112and may be patterned to form opening within areas of the memory arrayregion 100 that overlie a respective one of the fourth metal linestructures 648. An anisotropic etch may be performed to transfer thepattern in the photoresist layer through the buffer layer 112, theconnection-via-level dielectric layer 110, and the dielectric cap layer108. The lower-electrode-contact via cavities may have tapered sidewallshaving a taper angle (within respective to a vertical direction) in arange from 1 degree to 10 degrees. A top surface of a fourth metal linestructure 648 may be physically exposed at the bottom of eachlower-electrode-contact via cavity. The photoresist layer may besubsequently removed, for example, by ashing.

A metallic barrier layer 122 may be formed as a material layer. Themetallic barrier layer may cover physically exposed top surfaces of thefourth metal line structures 648, tapered sidewalls of thelower-electrode-contact via cavities, and the top surface of bufferlayer 112 without any hole therethrough. The metallic barrier layer 122may include a conductive metallic nitride such as TiN, TaN, and/or WN.Other suitable materials within the contemplated scope of disclosure mayalso be used. The thickness of the metallic barrier layer 122 may be ina range from 3 nm to 20 nm, although lesser and greater thicknesses mayalso be used.

A metallic fill 124 material such as tungsten or copper may be depositedin remaining volumes of the lower-electrode-contact via cavities.Portions of the metallic fill 124 material and the metallic barrierlayer 122 that overlie the horizontal plane including the topmostsurface of the buffer layer 112 may be removed by a planarizationprocess such as chemical mechanical planarization to form. Eachremaining portion of the metallic fill material located in a respectivevia cavity comprises a metallic via fill material portion 124. Eachremaining portion of the metallic barrier layer 122 in a respective viacavity comprises a metallic barrier layer 122. Each combination of ametallic barrier layer 122 and a metallic fill material portion 124 thatfills a via cavity constitutes a connection via structure (122, 124). Anarray of connection via structures (122, 124) may be formed in thebuffer layer 112 and the connection-via-level dielectric layer 110 onunderlying metal interconnect structures.

FIG. 4 is a vertical cross-sectional view of the exemplary structureafter formation of a bottom electrode material layer, a nonmagneticmetallic buffer layer, a synthetic antiferromagnet layer, a nonmagnetictunnel barrier layer, a free magnetization layer, a top electrodematerial layer, and a metallic etch mask material layer according to anembodiment of the present disclosure. Referring to FIG. 4 , a layerstack including a bottom electrode material layer 126L, a nonmagneticmetallic buffer material layer 130L, a synthetic antiferromagnet layer140L, a nonmagnetic tunnel barrier material layer 146L, a freemagnetization material layer 148L, a top electrode material layer 158L,and a metallic etch mask material layer 159L may be formed over themetallic barrier layer and the metallic via fill material portions 124.The layers within the layer stack may be deposited by a respectivechemical vapor deposition process or a respective physical vapordeposition process. Each layer within the layer stack may be depositedas planar blanket material layers having a respective uniform thicknessthroughout. The nonmagnetic metallic buffer material layer 130L, thesynthetic antiferromagnet layer 140L, the nonmagnetic tunnel barriermaterial layer 146L, and the free magnetization material layer 148L arecollectively referred to as memory material layers. In other words,memory material layers are formed between the bottom electrode materiallayer 126L and the top electrode material layer 158L.

While the present disclosure is described employing an embodiment inwhich the memory material layers include the nonmagnetic metallic buffermaterial layer 130L, the synthetic antiferromagnet layer 140L, thenonmagnetic tunnel barrier material layer 146L, and the freemagnetization material layer 148L, the methods and structures of thepresent disclosure may be applied to any structure in which the memorymaterial layers include a different layer stack provided between abottom electrode material layer 126L and a top electrode material layer158L and include material layers that may store information in anymanner. Modifications of the present disclosure are expresslycontemplated herein in which the memory material layers include a phasechange memory (PCM) material, a ferroelectric (Fe) memory material, or avacancy-modulated conductive oxide material.

The bottom electrode material layer 126L includes at least onenonmagnetic metallic material such as TiN, TaN, WN, W, Cu, Al, Ti, Ta,Ru, Co, Mo, Pt, an alloy thereof, and/or a combination thereof. Othersuitable materials within the contemplated scope of disclosure may alsobe used. For example, the bottom electrode material layer 126L mayinclude, and/or may consist essentially of, an elemental metal such asW, Cu, Ti, Ta, Ru, Co, Mo, or Pt. The thickness of the bottom electrodematerial layer 126L may be in a range from 10 nm to 100 nm, althoughlesser and greater thicknesses may also be used.

The nonmagnetic metallic buffer material layer 130L includes anonmagnetic material that may function as a seed layer. Specifically,the nonmagnetic metallic buffer material layer 130L may provide atemplate crystalline structure that aligns polycrystalline grains of thematerials of the synthetic antiferromagnet layer 140L along directionsthat maximizes the magnetization of a reference layer within thesynthetic antiferromagnet layer 140L. The nonmagnetic metallic buffermaterial layer 130L may include Ti, a CoFeB alloy, a NiFe alloy,ruthenium, or a combination thereof. The thickness of the nonmagneticmetallic buffer material layer 130L may be in a range from 3 nm to 30nm, although lesser and greater thicknesses may also be used.

The synthetic antiferromagnet (SAF) layer 140L may include a layer stackof a ferromagnetic hard layer 141, an antiferromagnetic coupling layer142, and a reference magnetization layer 143. Each of the ferromagnetichard layer 141 and the reference magnetization layer 143 may have arespective fixed magnetization direction. The antiferromagnetic couplinglayer 142 provides antiferromagnetic coupling between the magnetizationof the ferromagnetic hard layer 141 and the magnetization of thereference magnetization layer 143 so that the magnetization direction ofthe ferromagnetic hard layer 141 and the magnetization direction of thereference magnetization layer 143 remain fixed during operation of thememory cells to be subsequently formed. The ferromagnetic hard layer 141may include a hard ferromagnetic material such as PtMn, IrMn, RhMn,FeMn, OsMn, etc. The reference magnetization layer 143 may include ahard ferromagnetic material such as Co, CoFe, CoFeB, CoFeTa, NiFe, CoPt,CoFeNi, etc. Other suitable materials within the contemplated scope ofdisclosure may also be used. The antiferromagnetic coupling layer 142may include ruthenium or iridium. The thickness of the antiferromagneticcoupling layer 142 may be selected such that the exchange interactioninduced by the antiferromagnetic coupling layer 142 stabilizes therelative magnetization directions of the ferromagnetic hard layer 141and the reference magnetization layer 143 at opposite directions, i.e.,in an antiparallel alignment. In one embodiment, the net magnetizationof the SAF layer 140L by matching the magnitude of the magnetization ofthe ferromagnetic hard layer 141 with the magnitude of the magnetizationof the reference magnetization layer 143. The thickness of the SAF layer140L may be in a range from 5 nm to 30 nm, although lesser and greaterthicknesses may also be used.

The nonmagnetic tunnel barrier material layer 146L may include atunneling barrier material, which may be an electrically insulatingmaterial having a thickness that allows electron tunneling. For example,the nonmagnetic tunnel barrier material layer 146L may include magnesiumoxide (MgO), aluminum oxide (Al₂O₃), aluminum nitride (AlN), aluminumoxynitride (AlON), hafnium oxide (HfO₂) or zirconium oxide (ZrO₂). Othersuitable materials within the contemplated scope of disclosure may alsobe used. The thickness of the nonmagnetic tunnel barrier material layer146L may be 0.7 nm to 1.3 nm, although lesser and greater thicknessesmay also be used.

The free magnetization material layer 148L includes a ferromagneticmaterial having two stable magnetization directions that are parallel orantiparallel to the magnetization direction of the referencemagnetization layer 143. The free magnetization material layer 148Lincludes a hard ferromagnetic material such as Co, CoFe, CoFeB, CoFeTa,NiFe, CoPt, CoFeNi, etc. Other suitable materials within thecontemplated scope of disclosure may also be used. The thickness of thefree magnetization material layer 148L may be in a range from 1 nm to 6nm, although lesser and greater thicknesses may also be used.

The top electrode material layer 158L includes a top electrode material,which may include any nonmagnetic material that may be employed for thebottom electrode material layer 126L. Exemplary metallic materials thatmay be employed for the top electrode material layer 158L include, butare not limited to, TiN, TaN, WN, W, Cu, Al, Ti, Ta, Ru, Co, Mo, Pt, analloy thereof, and/or a combination thereof. Other suitable materialswithin the contemplated scope of disclosure may also be used. Forexample, the bottom electrode material layer 126L may include, and/ormay consist essentially of, an elemental metal such as W, Cu, Ti, Ta,Ru, Co, Mo, or Pt. The thickness of the top electrode material layer158L may be in a range from 10 nm to 100 nm, although lesser and greaterthicknesses may also be used.

The metallic etch mask material layer 159L includes a metallic etch stopmaterial that provides high resistance to an anisotropic etch process tobe subsequently employed to etch a dielectric material (which mayinclude, for example, undoped silicate glass, a doped silicate glass, ororganosilicate glass). In one embodiment, the metallic etch maskmaterial layer 159L may include a conductive metallic nitride material(such as TiN, TaN, or WN) or a conductive metallic carbide material(such as TiC, TaC, or WC). In one embodiment, the metallic etch maskmaterial layer 159L includes, and/or consists essentially of, TiN. Themetallic etch mask material layer 159L may be deposited by chemicalvapor deposition or physical vapor deposition. The thickness of themetallic etch mask material layer 159 may be in a range from 2 nm to 20nm, such as from 3 nm to 10 nm, although lesser and greater thicknessesmay also be employed.

FIG. 5 is a vertical cross-sectional view of the exemplary structureafter patterning the metallic etch mask material layer into metallicetch mask portions according to an embodiment of the present disclosure.Referring to FIG. 5 , a photoresist layer 177 may be applied over themetallic etch mask material layer 159L, and may be lithographicallypatterned to form an array of discrete photoresist material portions.Each discrete photoresist material portion in the array of discretephotoresist material portions may overlie a respective one of theconnection via structures (122, 124). In one embodiment, the connectionvia structures (122, 124) may be arranged as a two-dimensional periodicarray having a first pitch along a first horizontal direction and asecond pitch along a second horizontal direction. The discretephotoresist material portions may be arranged as a two-dimensionalperiodic array having the same periodicity as the two-dimensionalperiodic array of the connection via structures (122, 124).

A first anisotropic etch process may be performed to etch unmaskedregions of the metallic etch mask material layer 159L. The firstanisotropic etch process employs the photoresist layer 177 as an etchmask, and patterned portions of the metallic etch mask material layer159L comprise metallic etch mask portion 159. The first anisotropic etchprocess patterns the metallic etch mask material layer 159L into atwo-dimensional array of metallic etch mask portions 159. Thetwo-dimensional array of metallic etch mask portions 159 may replicatethe pattern of the photoresist layer 177. The photoresist layer 177 maybe removed after the first anisotropic etch process, or may remain onthe two-dimensional array of metallic etch mask portions 159 during asubsequent second anisotropic etch process.

FIG. 6 is a vertical cross-sectional view of the exemplary structureafter formation of an array of memory cells and an array of metallicetch stop portions according to an embodiment of the present disclosure.Referring to FIG. 6 , a second anisotropic etch process, such as ionbeam etching, may be performed to transfer the pattern of thetwo-dimensional array of metallic etch mask portions 159 through thelayer stack including the top electrode material layer 158L, the freemagnetization material layer 148L, the nonmagnetic tunnel barriermaterial layer 146L, the synthetic antiferromagnet layer 140L, thenonmagnetic metallic buffer material layer 130L, and the bottomelectrode material layer 126L. Portions of the layer stack (158L, 148L,146L, 140L, 130L, 126L) that are not masked by the metallic etch maskportions 159 may be etched during the second anisotropic etch process.In embodiments in which the photoresist layer 177 is present at thebeginning of the second anisotropic etch process, the photoresist layer177 may be collaterally consumed during the second anisotropic etchprocess, and the metallic etch mask portions 159 may be employed as anetch mask at least during pattering of the bottom electrode materiallayer 126L. Alternatively, in embodiments in which the photoresist layer177 is removed prior to the second anisotropic etch process, themetallic etch mask portions 159 may be employed as an etch maskthroughout the second anisotropic etch process.

The second anisotropic etch process may include a series of anisotropicetch steps that sequentially etches the various material layers of theunderlying layer stack. In one embodiment, patterned portions of thelayer stack may include sidewalls having a non-zero taper angle, i.e.,having a non-vertical surface. The taper angle may vary from layer tolayer, and generally may be in a range from 3 degrees to 30 degrees,such as from 6 degrees to 20 degrees, although lesser and greater taperangles may also be employed.

Unmasked portions of the buffer layer 112 may be vertically recessed bythe second anisotropic etch process. For example, as a result of theloading effect caused during ion beam etching, the exposed surfaces ofthe buffer layer 112 may be recessed to a greater degree in the logicregion 200 than in the memory array region 100. In other words, portionsof the buffer layer 112 are thicker in the memory array region 100 thanin the logic region 200. However, due to the etching rate of the bufferlayer 112 material (Al2O3, Ta2O5, etc.), the buffer layer 112 maypersist through the ion beam etching process, thus allowing theunderlying layers (connection-via-level dielectric layer 110, dielectriccap layer 108) from being exposed, allowing the protection of the metalline structures 648 during subsequent etching processes. For example,the selectivity of the Al2O3 (buffer layer 112) to the TiN (bottomelectrode material layer 126L) allows for the minimization of the loadeffect, having a relative etching rate of 0.8 to 1.3 within the logicregion 200 relative to the etching rate of the bottom electrode materiallayer 126L. For example, a buffer layer 112 comprised of Al2O3 may beion beam etched at a rate of 0.8-1.3 times as fast as the rate to ionbeam etch a bottom electrode material layer 126L comprised of TiN.

The layer stack (159L, 158L, 148L, 146L, 140L, 130L, 126L) of themetallic etch mask material layer 159L, the top electrode material layer158L, the free magnetization material layer 148L, the nonmagnetic tunnelbarrier material layer 146L, the synthetic antiferromagnet layer 140L,the nonmagnetic metallic buffer material layer 130L, and the bottomelectrode material layer 126L may be patterned into an array of memorycells (126, 130, 140, 146, 148, 158) and an array of metallic etch maskportions 159. Each of the memory cells (126, 130, 140, 146, 148, 158)comprises a bottom electrode 126, a memory material stack (130, 140,146, 148), and a top electrode 158. Each of the metallic etch maskportion 159 is a patterned portion of the metallic etch mask materiallayer 159L that overlies a respective one of the memory cells (126, 130,140, 146, 148, 158).

In one embodiment, each memory cell (126, 130, 140, 146, 148, 158) maybe a magnetic tunnel junction (MTJ) memory cell. Each MTJ memory cell(126, 130, 140, 146, 148, 158) may include a bottom electrode 126, amagnetic tunnel junction structure (140, 146, 148), and a top electrode158. Each magnetic tunnel junction (140, 146, 148) may include asynthetic antiferromagnet (SAF) structure 140, a nonmagnetic tunnelbarrier layer 146, and a free magnetization layer 148. A nonmagneticmetallic buffer layer 130 may be provided between the bottom electrode126 and the magnetic tunnel junction (140, 146, 148). Each bottomelectrode 126 is a patterned portion of the bottom electrode materiallayer 126L. Each SAF structure 140 is a patterned portion of the SAFlayer 140L. Each nonmagnetic tunnel barrier layer 146 is a patternedportion of the nonmagnetic tunnel barrier material layer 146L. Each freemagnetization layer 148 is a patterned portion of the free magnetizationmaterial layer 148L. Each top electrode 158 is a patterned portion ofthe metallic etch mask material layer 158L. In one embodiment, themetallic etch mask portions 159 comprise, and/or consist essentially of,a conductive metallic nitride material (such as TiN, TaN, or WN), andeach of the memory cells (126, 130, 140, 146, 148, 158) comprises avertical stack including a synthetic antiferromagnet structure 140, anonmagnetic tunnel barrier layer 146, and a free magnetization layer148.

FIG. 7 is a vertical cross-sectional view of the exemplary structureafter formation of an array of inner dielectric spacer portionsaccording to an embodiment of the present disclosure. Referring to FIG.7 , a first dielectric material such as silicon nitride may beconformally deposited over the array of memory cells (126, 130, 140,146, 148, 158) and the array of metallic etch mask portions 159. Forexample, the first dielectric material may be deposited by a chemicalvapor deposition process. The thickness of the first dielectric materialover a horizontal surface may be in a range from 2 nm to 20 nm, such asfrom 4 nm to 10 nm, although lesser and greater thicknesses may also beemployed. An anisotropic etch process may be performed to removehorizontal portions of the first dielectric material. Remaining portionsof the first dielectric material comprise an array of inner dielectricspacer portions 162 that laterally surrounds the array of memory cells(126, 130, 140, 146, 148, 158). In one embodiment, the duration of theanisotropic etch process may be selected such that sidewalls of thearray of metallic etch mask portions 159 are partly or fully physicallyexposed. The maximum thickness of each inner dielectric spacer portion162 may be in a range from 2 nm to 20 nm, such as from 4 nm to 10 nm,although lesser and greater thicknesses may also be employed.

FIG. 8 is a vertical cross-sectional view of the exemplary structureafter formation of an array of outer dielectric spacer portionsaccording to an embodiment of the present disclosure. Referring to FIG.8 , a second dielectric material such as a dielectric metal oxide may beconformally deposited over the array of inner dielectric spacer portions162. For example, the second dielectric material may include aluminumoxide, hafnium oxide, lanthanum oxide, or yttrium oxide, and may bedeposited by a chemical vapor deposition process. The thickness of thesecond dielectric material over a horizontal surface may be in a rangefrom 2 nm to 20 nm, such as from 4 nm to 10 nm, although lesser andgreater thicknesses may also be employed. An anisotropic etch processmay be performed to remove horizontal portions of the second dielectricmaterial. Remaining portions of the second dielectric material comprisean array of outer dielectric spacer portions 164 that laterallysurrounds the array of inner dielectric spacer portions 162. In oneembodiment, the outer dielectric spacer portions 164 may be depositeddirectly on sidewalls of the metallic etch mask portions 159. In oneembodiment, the entirety of each sidewall of the metallic etch maskportions 159 may contact a respective outer dielectric spacer portion164. The maximum thickness of each outer dielectric spacer portion 164may be in a range from 2 nm to 20 nm, such as from 4 nm to 10 nm,although lesser and greater thicknesses may also be employed.

Each contiguous combination of an inner dielectric spacer portion 162and an outer dielectric spacer portion 164 constitutes a dielectricspacer (162, 164). An array of dielectric spacers (162, 164) laterallysurrounds the array of memory cells (126, 130, 140, 146, 148, 158) andthe array of metallic etch mask portions 159. While the presentdisclosure is described employing an embodiment in which a dielectricspacer (162, 164) includes an inner dielectric spacer portion 162 and anouter dielectric spacer portion 164, embodiments are expresslycontemplated herein in which a dielectric spacer consists of an innerdielectric spacer portion 162 or consists of an outer dielectric spacerportion 164. Generally, a dielectric spacer (162, 164) may be formedaround each metallic etch mask portion 159 within the array of metallicetch mask portions 159. Each dielectric spacer (162, 164) may be formeddirectly on, and around, a sidewall of a respective metallic etch maskportion 159.

The etching processes performed in FIGS. 7 and 8 may cause the bufferlayer 112 to recess further while still maintaining layers (108, 110) toprotect the metal line structures 648 in the logic region 200 fromexposure and contamination. In one embodiment, subsequent etchingprocesses may be performed after forming and etching the dielectricspacers (162, 164) as shown in FIG. 8 to completely remove the bufferlayer 112 in the logic region 200, thus exposing theconnection-via-level dielectric layer 110. By first forming thedielectric spacers (162, 164) before removing the buffer layer 112within the logic region 200 may allow for the protection of theconnection-via-level dielectric layer 110, such that theconnection-via-level dielectric layer 110 may not be etched in excessduring the formation of the MTJ structures. The buffer layer 112 may beremoved through a wet etching process in preparation of depositingfurther layers to complete the MTJ structure. For example, a wet etchingprocess using hydrofluoric acid (HF) may be performed. The buffer layer112 may be comprised of Al2O3, which has a wet etching rate in HF acidin a range of 220 to 260 A/min (e.g., 240 A/min). Performing a wetetching process to remove the buffer layer 112 in the logic region 200may also partially remove exposed portions of the buffer layer 112(e.g., between dielectric spacers (162, 164) in the memory array region100. However, due to the loading effect during the previously performedIBE process, exposed portions of the buffer layer 112 in the memoryarray region 100 may be thicker than portions of the buffer layer 112 inthe logic region 200. Therefore, the wet etch process may be controlledto remove the buffer layer 112 in the logic region 200 while retainingthe buffer layer 112 in the memory array region 100. Controlling the wetetch process to retain portions of the buffer layer 112 within thememory array region 100 may prevent gaps or voids from forming around orbelow the dielectric spacers (162, 164).

FIG. 9 is a vertical cross-sectional view of the exemplary structureafter formation of a memory-level dielectric layer according to anembodiment of the present disclosure. Referring to FIG. 9 , amemory-level dielectric layer 170 may be formed around the array ofdielectric spacers (162, 164). The memory-level dielectric layer 170includes a planarizable dielectric material such as undoped silicateglass or a doped silicate glass. The dielectric material of thememory-level dielectric layer 170 may be deposited by a conformaldeposition process (such as a chemical vapor deposition process) or aself-planarizing deposition process (such as spin coating). A chemicalmechanical planarization process may be performed to remove portions ofthe deposited dielectric material from above the horizontal planeincluding the top surfaces of the metallic etch mask portions 159.Various planarization assist structures (not shown) such as electricallyisolated patterned portions of the metallic etch mask material layer159L and underlying material layers may be employed in the logic region200 to assist planarization of the deposited dielectric material.Remaining portions of the deposited dielectric material after theplanarization process constitute the memory-level dielectric layer 170.The top surface of the memory-level dielectric layer 170 may be withinthe same horizontal plane as the top surfaces of the metallic etch maskportions 159. In one embodiment, top surfaces of the dielectric spacers(162, 164), such as the top surfaces of the outer dielectric spacerportions 164, may be within the same horizontal plane as the top surfaceof the memory-level dielectric layer 170.

FIG. 10 is a vertical cross-sectional view of the exemplary structureafter formation of an array contact structures within the memory arrayregion 100 and the logic region 200 according to an embodiment of thepresent disclosure. Referring to FIG. 10 , methods may be used tocomplete the fabrication process of the MTJ structures illustrated inFIGS. 2-10 in conjunction with the buffer layer 112. For example, anyfurther processes to complete the MTJ structures may involve etchingremaining portions, if any, of the buffer layer 112 in the logic region200 to deposit metal or contact layers with the metal line structures648. Disposing the buffer layer 112 over the connection-via-leveldielectric layer 110 may prevent over-etching of theconnection-via-level dielectric layer 110 during a second anisotropicetch process that is used to form the individual memory cells in thememory array region 100. In this manner, the metal line structures 648in the logic region 200 may be protected from exposure andcontamination. By including a buffer layer 112 having a relative ionbeam etching rate of 0.8 to 1.3 over the connection-via-level dielectriclayer 110, the amount of etch due to the loading effect of the secondanisotropic etch process may be reduced by as much as 67%.

An array of contact via structures 180 may be formed within the memoryarray region 100 and an array of connection via structures 280 may beformed within the logic region 200. Each contact via structure 180includes a respective metallic barrier layer 182 and a respectivemetallic fill material portion 184. Each connection via structure 280includes a respective metallic barrier layer 282 and a respectivemetallic fill material portion 284. The top surfaces of the contact viastructures 180 and the connection via structures 280 may be within thesame horizontal plane as the top surface of a via-level dielectric layer176 (i.e. after performing a CMP process).

Generally, the contact via structures 180 may be formed by depositing atleast one conductive material in via cavities (not shown) in the memoryarray region 100, and the connection via structures 280 may be formed bydepositing the at least one conductive material in via cavities (notshown) in the logic region 200. The via cavities for the connection viastructures 280 may be formed by removing portions, such as through anetching process, of the various layers including the via-leveldielectric layer 176, the memory-level dielectric layer 170, the bufferlayer 112 (if any remains in logic region 200), the connection-via-leveldielectric layer 110, and the dielectric cap layer 108. Each contact viastructure 180 may be formed directly on a top surface of a respectivemetallic etch mask portion 159 exposed within a respective via cavity.An array of contact via structures 180 may be formed on the top surfacesof metallic etch mask portions 159 in the array of the via cavities. Inembodiments in which the upper portion of each via cavity has a greaterlateral extent than the downward-protruding portion of the respectivevia cavity in the memory array region 100, a horizontal bottom surfaceof each contact via structure 180 may contact a horizontal surface of adielectric spacer (162, 164) and/or a horizontal surface of thememory-level dielectric layer 170. In one embodiment, the horizontalsurface of a contact via structure 180 that contacts the dielectricspacer (162, 164) and/or the memory-level dielectric layer 170 mayinclude an annular bottom surface of the upper portion of the contactvia structure 180.

Each connection via structure 280 may be formed directly on a topsurface of a respective metal interconnect structures 648. For example,the connection-via-level dielectric layer 110 and the dielectric caplayer 108 may remain after performing the IBE etch process and anysubsequent etching processes. Thus, additional deposition (formingmasks) and etching processes may be performed to etch any remainingportions of the buffer layer 112 (if any remains in the logic region200), selected portions of the connection-via-level dielectric layer110, and selected portions of the dielectric cap layer 108 to expose atop surface of the respective metal interconnect structures 648. Suchetching processes may also etch the memory-level dielectric layer 170, afirst dielectric etch stop layer 172, a second dielectric etch stoplayer 174, and a via-level dielectric layer 176 to form via-levelcavities in which the connection via structures 280 may be formed.

A line-level dielectric layer 190 may be deposited over the via-leveldielectric layer 176. The line-level dielectric layer 190 may includeany inter-layer dielectric (ILD) material. The thickness of theline-level dielectric layer 190 may be in a range from 100 nm to 600 nm,such as from 150 nm to 300 nm, although lesser and greater thicknessesmay also be used. Line trenches may be formed through the line-leveldielectric layer 190, for example, by applying and patterning aphotoresist layer over the line-level dielectric layer 190, and bytransferring the pattern in the photoresist layer through the line-leveldielectric layer 190 by performing an anisotropic etch process. Thephotoresist layer may be subsequently removed, for example, by ashing.At least one contact via structure 180 and/or at least one connectionvia structure 280 may be physically exposed at the bottom of each linetrench. At least one conductive material (such as a combination of ametallic barrier material and a metallic fill material) may be depositedin the line trenches, and excess portions of the at least one conductivematerial may be removed from above the horizontal plane including thetop surface of the line-level dielectric layer 190 by a planarizationprocess such as a CMP process. Remaining portions of the at least oneconductive material that fill the line trenches comprise metal linestructures (192, 198). The metal line structures (192, 198) may includearray-connection metal lines 192 that contact at least one of thecontact via structures 180 and logic-region metal lines 198 that do notdirectly contact the contact via structures 180. In one embodiment, thearray-connection metal lines 192 may include word lines or bit lines forthe two-dimensional array of memory cells (126, 130, 140, 146, 148,158).

Referring to FIG. 11 , a flowchart illustrates the general processingsteps of the methods of the present disclosure for forming a single MTJmemory device. An MTJ memory device may be formed by this method.Referring to step 1110 and FIG. 2 , a dielectric cap layer (108) may beformed over a substrate (9). Referring to step 1120 and FIG. 2 , a firstdielectric layer (110) may be formed over the dielectric cap layer(108). Referring to step 1130 and FIG. 2 , a buffer layer (112) may beformed over the first dielectric layer (110). Referring to step 1140 andFIG. 3 , the buffer layer (112), the first dielectric layer (110), andthe dielectric cap layer (108) may be patterned to form a cavity throughthe buffer layer (112), the first dielectric layer (110), and thedielectric cap layer (108). Referring to step 1150 and FIG. 3 , a fillmaterial (124) may be deposited into the cavity to form a connection viastructure (122, 124). Referring to step 1160 and FIG. 4 , a bottomelectrode layer (126L) may be formed over the surface of the connectionvia structure (122, 124) and the buffer layer (112). Referring to step1170 and FIG. 4 , one or more MTJ layers may be formed for forming anMTJ memory cell (126, 130, 140, 146, 148, 158). Referring to step 1180and FIG. 5 , a mask (e.g., photoresist layer 177) may be formed over theone or more MTJ layers. Referring to step 1190 and FIG. 6 , an ion beametch process may be performed to pattern the one or more MTJ layers toform the MTJ memory cell (126, 130, 140, 146, 148, 158) and to patternthe bottom electrode layer (126L) into a bottom electrode (126), suchthat the buffer layer (112) prevents the ion beam etch process fromexposing underlying metal interconnect structures 648.

Referring to all drawings and according to various embodiments of thepresent disclosure, a memory cell structure is provided. The memory cellstructure may include a first dielectric layer (110). The memory cellstructure may further include a buffer layer (112) disposed over thefirst dielectric layer (110), and a connection via structure (122, 124)embedded in the buffer layer (112) and the first dielectric layer (110).The memory cell device may further include a bottom electrode (126)disposed on the connection via structure (122, 124) and the buffer layer(112), in which the buffer layer has an etching rate of 0.8 to 1.3relative to a bottom electrode etching rate. The memory cell device mayfurther include an MTJ memory cell (126, 130, 140, 146, 148, 158)including one or more MTJ layers disposed on the bottom electrode (126).

In one embodiment, the buffer layer (112) may be comprised of aluminumoxide (Al₂O₃). In another embodiments, the buffer layer (112) may becomprised of tantalum pentoxide (Ta₂O₅). In one embodiment, the bufferlayer (112) may have a vertical thickness of 10 nanometers to 70nanometers. In one embodiment, the buffer layer (112) may have avertical thickness ratio of 0.7 to 1 relative to a vertical thickness ofthe bottom electrode (126). In one embodiment, the buffer layer (112)has a relative ion beam etching rate of 0.8 to 1.3 relative to the ionbeam etching rate of the bottom electrode (126). In one embodiment,exposed portions of the buffer layer (112) may be removed through a wetetch process. In one embodiment, the buffer layer (112) may have a wetetch rate of 240 A/min.

Referring to all drawings and according to various embodiments of thepresent disclosure, an MTJ memory device is provided. The MTJ memorydevice may include an array of MTJ memory cells located over a substrate(9), wherein each of the MTJ memory cells (126, 130, 140, 146, 148, 158)comprises a bottom electrode (126), one or more MTJ layers (130, 140,146, 148), and a top electrode (158). The MTJ memory device may furtherinclude an array of connection via structures, such that each connectionvia structure (122, 124) of the array of connection via structures maycontact a bottom surface of a respective bottom electrode (126) of arespective one of the MTJ memory cells (126, 130, 140, 146, 148, 158).The MTJ memory device may further include a buffer layer (112) that maysurround sidewalls of the connection via structures (122, 124), suchthat a top surface of the buffer layer (112) may contact a bottomsurface of each bottom electrode (126) of each of the MTJ memory cells(126, 130, 140, 146, 148, 158) of the array of MTJ memory cells. In oneembodiment, the array of MTJ memory cells (126, 130, 140, 146, 148, 158)may be disposed within a memory array region (100). In one embodiment,the buffer layer (112) may be disposed within the memory array region(100) and a logic region (200) having a lower element density than thememory array region (100) (i.e. the logic region has fewer structuralelements than the memory array region across a horizontal plane of theMTJ memory device).

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A memory cell structure, comprising: a firstmetal line structure embedded in a dielectric material layer overlying asubstrate and having a top surface within a horizontal plane including atop surface of the dielectric material layer; a dielectric layer stackoverlying the first metal line structure and the dielectric materiallayer and including, from bottom to top, a dielectric cap layer, aconnection-via-level dielectric layer, and a buffer layer; a connectionvia structure contacting a top surface of the first metal linestructure, vertically extending through the dielectric layer stack, andhaving a top surface that is coplanar with a first horizontal surfacesegment of a top surface of the buffer layer; a bottom electrodedisposed on the connection via structure and the buffer layer; amagnetic tunnel junction (MTJ) memory cell including one or more MTJlayers and disposed on the bottom electrode in a memory array region; adielectric spacer laterally surrounding the MTJ memory cell; and amemory-level dielectric layer that comprises a dielectric material whichis laterally spaced by the dielectric spacer from the MTJ memory cell,wherein the dielectric material of the memory-level dielectric layerlaterally surrounds the MTJ memory cell, directly contacts a secondhorizontal surface segment of the top surface of the buffer layer thatis vertically recessed relative to the first horizontal surface segmentof the top surface of the buffer layer in the memory array region, anddirectly contacts a horizontal surface of the connection-via-leveldielectric layer in a logic region that is laterally spaced from thememory array region.
 2. The memory cell structure of claim 1, whereinthe buffer layer comprises aluminum oxide (Al₂O₃).
 3. The memory cellstructure of claim 1, wherein: the dielectric cap layer comprisessilicon nitride or silicon carbide; and the connection-via-leveldielectric layer comprises undoped silicate glass or a doped silicateglass.
 4. The memory device of claim 1, wherein: an entirety of a bottomsurface of the bottom electrode is in contact with the top surface ofthe connection via structure and a horizontal top surface segment of thebuffer layer.
 5. The memory device of claim 1, further comprising: asecond metal line structure embedded in the dielectric material layerand located in the logic region; and a connection via structurevertically extending through the memory-level dielectric layer, theconnection-via-level dielectric layer, and the dielectric cap layer,contacting a top surface of the second metal line structure, and not indirect contact with the buffer layer.
 6. The memory device of claim 5,further comprising a via-level dielectric layer laterally extendingacross the memory array region and the logic region, wherein a topsurface of the connection via structure is coplanar with a top surfaceof the via-level dielectric layer.
 7. The memory device of claim 6,further comprising a contact via structure overlying the MTJ memory celland laterally surrounded by, and in contact with, the via-leveldielectric layer.
 8. The memory device of claim 7, wherein the contactvia structure has a top surface that is coplanar with the top surface ofthe via-level dielectric layer.
 9. The memory device of claim 7,wherein: the MTJ memory cell comprises a top electrode; and the memorydevice further comprises a metallic etch mask portion in contact with atop surface of the top electrode of the MTJ memory cell and in contactwith a bottom surface of the contact via structure.
 10. The memorydevice of claim 9, wherein the memory device further comprises: a firstdielectric etch stop layer located in the memory array region andoverlying the memory-level dielectric layer; and a second dielectricetch stop layer located in the memory array region and overlying thefirst dielectric etch stop layer and underlying the via-level dielectriclayer, wherein the first dielectric etch stop layer and the seconddielectric etch stop layer are not in direct contact with the connectionvia structure.
 11. A magnetic tunnel junction (MTJ) memory devicecomprising: metal line structures embedded in a dielectric materiallayer overlying a substrate and having a respective top surface within ahorizontal plane including a top surface of the dielectric materiallayer; a dielectric layer stack overlying the metal line structures andthe dielectric material layer and including, from bottom to top, adielectric cap layer, a connection-via-level dielectric layer, and abuffer layer; an array of connection via structures contacting a topsurface of a respective one of the metal line structures, verticallyextending through the dielectric layer stack, and having a respectivetop surface that is coplanar with a respective first horizontal surfacesegment of a top surface of the buffer layer; and an array of MTJ memorycells located in a memory array region over the dielectric layer stackand the array of connection via structures; an array of dielectricspacers laterally surrounding a respective MTJ memory cell within thearray of memory cells; and a memory-level dielectric layer thatcomprises a dielectric material which is laterally spaced by arespective dielectric spacer within the array of dielectric spacers froma respective MTJ memory cell within the array of MTJ memory cells,wherein the dielectric material of the memory-level dielectric layerlaterally surrounds the MTJ memory cell, directly contacts a secondhorizontal surface segment of the top surface of the buffer layer thatis vertically recessed relative to the first horizontal surface segmentof the top surface of the buffer layer in the memory array region, anddirectly contacts a horizontal surface of the connection-via-leveldielectric layer in a logic region that is laterally spaced from thememory array region, wherein each of the MTJ memory cells comprises: abottom electrode having a bottom surface that contacts a respective oneof the connection via structures; one or more MTJ layers; and a topelectrode.
 12. The MTJ memory device of claim 11, wherein the array ofMTJ memory cells is disposed within a memory array region, and whereinthe buffer layer is disposed within the memory array region and a logicregion having a lower element density than the memory array region. 13.The MTJ memory device of claim 11, wherein the buffer layer comprisesaluminum oxide (Al₂O₃) or tantalum pentoxide (Ta₂O₅).
 14. The MTJ memorydevice of claim 11, wherein the buffer layer comprises aluminum oxide(Al₂O₃).
 15. A magnetic tunnel junction (MTJ) memory device comprising:metal line structures embedded in a dielectric material layer overlyinga substrate and having a respective top surface within a horizontalplane including a top surface of the dielectric material layer; adielectric layer stack overlying the metal line structures and thedielectric material layer and including, from bottom to top, adielectric cap layer, a connection-via-level dielectric layer, and abuffer layer; an array of connection via structures contacting a topsurface of a respective one of the metal line structures, verticallyextending through the dielectric layer stack, and having a respectivetop surface; and a first MTJ memory cell located in a memory arrayregion over the dielectric layer stack and the array of connection viastructures and comprising a first bottom electrode; and a second MTJmemory cell located in the memory array region over the dielectric layerstack and the array of connection via structures and comprising a secondbottom electrode, wherein the buffer layer comprises: first horizontalsurface segments contacting bottom surfaces of a respective one of thefirst bottom electrode and the second bottom electrode; and a secondhorizontal surface segment located between proximate edges of the firstbottom electrode and the second bottom electrode and vertically recessedrelative to the first horizontal surface segments, and wherein the MTJmemory device further comprises: a first dielectric spacer laterallysurrounding the first MTJ memory cell; a second dielectric spacerlaterally surrounding the second MTJ memory cell; and a memory-leveldielectric layer that comprises a dielectric material which is laterallyspaced by the first dielectric spacer from the first MTJ memory cell,which is not in direct contact with, and is laterally spaced by thesecond dielectric spacer from, the second MTJ memory cell, wherein thedielectric material of the memory-level dielectric layer laterallysurrounds the first MTJ memory cell and the second MTJ memory cell,directly contacts a second horizontal surface segment of the top surfaceof the buffer layer that is vertically recessed relative to the firsthorizontal surface segment of the top surface of the buffer layer in thememory array region, and directly contacts a horizontal surface of theconnection-via-level dielectric layer in a logic region that islaterally spaced from the memory array region.
 16. The MTJ memory deviceof claim 15, wherein: the first MTJ memory cell further comprises: afirst inner dielectric spacer portion having an inner sidewall incontact with a sidewall of the first bottom electrode and a sidewall ofthe buffer layer that extends from the sidewall of the first bottomelectrode; and the second MTJ memory cell further comprises: a secondinner dielectric spacer portion having an inner sidewall in contact witha sidewall of the second bottom electrode and a sidewall of the bufferlayer that extends from the sidewall of the second bottom electrode. 17.The MTJ memory device of claim of claim 16, wherein: the first MTJmemory cell further comprises: a first outer dielectric spacer portionhaving an inner sidewall in contact with an outer sidewall of the firstinner dielectric spacer portion and having a bottom surface in contactwith a first peripheral portion of the second horizontal surfacesegment; and the second MTJ memory cell further comprises: a secondouter dielectric spacer portion having an inner sidewall in contact withan outer sidewall of the second inner dielectric spacer portion andhaving a bottom surface in contact with a second peripheral portion ofthe second horizontal surface segment.
 18. The MTJ memory device ofclaim 16, wherein: the sidewall of the buffer layer that extends fromthe sidewall of the first bottom electrode has a taper angle that isless than or equal to a taper angle of the first bottom electrode, andthe sidewall of the buffer layer that extends from the sidewall of thesecond bottom electrode has a taper angle that is less than or equal toa taper angle of the second bottom electrode.
 19. The MTJ memory deviceof claim 15, wherein the buffer layer comprises aluminum oxide (Al₂O₃)or tantalum pentoxide (Ta₂O₅).